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目錄:上海西努光學(xué)科技有限公司>>自動(dòng)化設(shè)備>>WDI MMS>> MMS LFOV

MMS LFOV
  • MMS LFOV
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MMS LFOVThe use of sensitive large-format line scan sensors and new large field of view high resolution objectives enable semiconductor, FPD and electronics manufacturers to speed up the inspection pr

Increased Throughput & Efficiency
The use of sensitive large-format line scan sensors and new large field of view high resolution objectives enable semiconductor, FPD and electronics manufacturers to speed up the inspection process . These increases lead to greater manufacturing efficiencies and production throughput.
Field of View Optics
The MMS LFOV incorporates specialized components of WDI’s Modular Microscope System (MMS) engineered to support LFOV objectives and cameras. The system uses a motorized Z-Axis Actuator, MMS body and 1X Tube Lens which have been engineered to ensure the highest optical quality is maintained over the entire sensor.
Automated Focus and Illumination
The MMS LFOV is able to incorporate any one of WDIs Autofocus Sensors and illumination options to create a compley autonomous inspection system which can be controlled with a single control unit. The flexibility in autofocus and perfectly homogeneous illumination allows the  to be used in a wide variety of manufacturing applications including semiconductor, FPD, OLED, packaging and photovoltaic and solar panel inspection.
Practical Design
To handle the high demands of manufacturing facilities, the  features rugged industrial components, a small footprint and low weight, even when fully automated. Its modular nature allows it to be compley upgradable,
ensuring the best performance for all current and future applications.

LARGE FIELD OF VIEW MODULAR MICROSCOPE

QIOPTIC 2XMagnification2X
Numerical Aperture0.08
Working Distance24.8mm
Field of View12.5mm
QIOPTIC 5XMagnification5X
Numerical Aperture0.2
Working Distance13.0mm
Field of View5mm
QIOPTIC 8XMagnification8X
Numerical Aperture0.32
Working Distance7.0mm (estimated)
Field of View3.125mm
Motorized Z ActuatorType1/32 Stepper Motor
Travel8mm (±4mm)
Maximum Resolution0.156μm/step
Maximum Speed10mm/sec
Maximum Acceleration100 mm/s2
AutofocusATF-4, ATF-5 ATF-6, ATF-7
IlluminationILL-WLED22, ILL-RLED22, ILL-GLED22, ILL-BLED22, ILL-4LED ILL-XESTR, ILL-XELED, ILL-HPLED
Cameras/Sensor SupportMaximum Detector Diagonal25mm (1X Tube lens)
Electrical Requirements18V to 25V DC24V Nominal
Operating Temperature10°C ~ 30°CAmbient
Operating Humidity< 70%Non Condensing

 

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