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化工儀器網>產品展廳>常用儀表>電量儀表>靜電測試儀>ES622-50 ES622 Series TLP Pulsed IV-Curve Sy...

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ES622-50 ES622 Series TLP Pulsed IV-Curve System

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ES622系列TLP脈沖IV曲線系統 ，HBM/MM/Latch-up測試機， ESD/CDM/Latch-UP抗靜電能力測試系統， ES612A 靜電測試儀(HBM、HMM、MM)， ESD靜電和閂鎖測試系統， CDM充電器件模型測試儀， CDM測試機， 半導體器件靜電測試儀， 晶圓級ESD測試儀，EMI近場測試掃描儀系統

應用領域 電子,航天,汽車,電氣

ES622 Series TLP Pulsed IV-Curve System


1.    Description

The model ES622 Series TLP Pulsed IV-Curve System is an advanced IV-curve characterization system designed to simulate ESD events (TLP/ VF-TLP/ HMM/ HBM/MM pulse) and monitor a device (semiconductors, discrete, circuit modules, etc.) in high power time domain. The ES622 has a higher specification, more functionality, greater expansion capability and better software experience compared to the previous model ES620 and ES621.

The TLP (transmission line pulse) test function is designed to meet the latest ANSI/ESD STM5.5.1 test standard and applies high quality rectangular pulses to devices and records both the voltage across and current through the device. This gives pulsed IV curves, allowing users to characterize a device’s transient response over ns time windows. Advanced automatic device failure detection methods are incorporated, such as DC Spot Check (V or I), Static IV curve, Fuse, Breakdown, and Bias Source Fluctuation.

The VF-TLP test is designed to simulate the CDM speed ESD event and captures the voltage across the DUT and current through the DUT under a high speed (such as <100 ps rise-time) ESD transient. This allows the user to study the response speed and peak clamping voltage of a device.

The HMM (Human Metal Model) test function is an alternative test method to IEC61000-4-2 system level ESD. It gives the equivalent waveform to an ideal standard waveform for low ohm devices and eliminates many IEC gun test problems for components or wafer level tests, such as repeatability, imprecision gun tip, impedance mismatches, EMI interferences from unshielded relays and special setup with large ground plane and coupling plane etc.

2.    Features

  • Most configurable TLP Pulsed IV-Curve System

  • Ultra-Compact Design System

  • Fast test speed with multi-thread processing

  • 20 A, 40A, 50 A, 100 A, 125A, 150 A models are available (Customization available)

  • Advanced system and accessory monitor and control in software available
    (switch lifespan monitor, E-Cal module, oscilloscope attenuation adjustment)

  • Test Function Expandable with vf-TLP, CC-TLP, HMM, HBM, MM options

  • Multiple automatic failure detection methods
    (DC spot check (V or I) or IV sweep, fuse, breakdown, and bias current change)

  • Software controlled pulsing: Burst, Continuous, IV-Curve Characterization

  • Rise-Time options from 40 ps to 1200 ns *(depends on model, customization available)

  • Pulse-Width options from 1 ns to 2000 ns *(depends on model, customization available)

Note*: Longer pulse applications are supported by EOS series with pulse width from few hundred of ns to few ms.

3.     Applications

  • ESD performance characterization

  • Wafer/ package level ESD test

  • System / circuit module ESD test

  • Safe operation area (SOA) test

  • Charge recovery time test

  • Solar panel diode characterization

  • Touchscreen ITO trace fuse and breakdown test

Related Standards:

  • TLP / VF-TLP option meets ANSI/ESD STM 5.5.1

  • HMM option meets ANSI/ESD SP5.6

  • HBM option meets ANSI/ESDA/JEDEC JS-001

  • MM option meets ANSI/ESDA SP5.2

4.    Specifications

ES622 Series TLP Unit Specifications

Typical Models ES622-20 ES622-50 ES622-100 ES622-125 ES622-150 Unit *Special models such as 40, 100, 200+ A are available per request
Output voltage  @ Open load ± 0.5 ~ 1000 ± 0.5 ~ 2500 ± 0.5 ~ 5000 ± 0.5 ~ 6250 ± 0.5 ~ 7500 V  
Min Voltage step @ Open load 0.1 0.1 0.1 0.1 0.1 V  
Output current @ Short load ± 0.01 ~ 20 ± 0.01 ~ 50 ± 0.01 ~ 100 ± 0.01 ~ 125 ± 0.01 ~ 150 A  
Voltage precision Accuracy adjustable between 1 – 10 % % Speed / accuracy software adjustable
Fastest rise-time*
(default 20-80%)		 ≤ 50 ≤ 200 ≤ 300 ≤ 300 ≤ 300 ps Fastest 10-90% 40 ps risetime is available with special configuration
Rise-time range 0.05 ~ 1200 0.2 ~ 1200 0.3 ~ 1200 0.3 ~ 1200 0.3 ~ 1200 ns  
Rise-time options Unlimited programable or manual options   per customization
Pulse-width
(default 50-50%)		 100 ± 1 ns Default
Min Pulse-width 0.5 1 5 5 5 ns  
Max Pulse-width 2000 2000 1500 1500 1000 ns  
Pulse-width options Unlimited programable or manual options   per customization
Test Speed Typical 0.2 ~ 2 Sec Varies between hardware setups
Dimensions 347 W X 300 D X 145 H mm May change per customization
Weight 8 8 8 10 12 kg  
Supported Oscilloscopes Major Series from Tektronix, Agilent, LeCroy, Rigol. Others supported on request
Supported SMU Keithley 24xx/26xx series SMU Others supported on request

ES62X-HMM2 External Human Metal Model (HMM) Module
(short circuit DUT, 100 ? HMM per ANSI/ESD SP5.6)

@ Typical Models ES620-20 ES620-50 ES622-100 ES620-125 ES620-150 Unit Comments
IEC equivalent level 6 12 24 30 36 kV  
HMM peak current 22.5 45 90 112.5 135 A 3.75 A per 1 kV ≤ ± 10 %

 

IEC 61000-4-2 (R=330?, C=150pF)
HMM current @ 30 ns 12 24 48 60 72 A ≤ ± 10 % (better than ±30% IEC)
HMM current @ 60 ns 6 12 24 30 36 A ≤ ± 10 % (better than ±30% IEC)

ES62X-HBM2 External Human Body Model (HBM) Module
(ANSI/ESDA/JEDEC JS-001 R=1.5 k?, C=100 pF)

@ Typical Models ES620-20 ES620-50 ES622-100 ES620-125 ES620-150 Unit Comments
Maximum HBM Test Level ± 2 ± 4 ± 8 ± 10 ± 12 kV  
Minimum HBM Test Level ± 50 V  
Minimum Test Level Step 1 V PCB controlled via USB
Charge Removal Resistance 10 K Ohm  
Test Speed >= 1 S Per Standard 1P/S
Physical Dimensions 90 X 90 X 130 mm  

ES62X-MM2 External Machine Model (MM) Module
(ANSI/ESDA/JEDEC JS-001 R=1.5 k?, C=100 pF)

Parameters MM-2K Unit Comments
Output Voltage ±10 ~ 2000 V  
Discharge RC Value C: 200 pF, R: 0 Ω    
Short Load Peak Current Ip1 1.75±10% per 100V A Tolerance may be different if socket is used
Short Load Ip2 67% ~ 90% of Ip1 A
Short Load Pulse Period tpm 66 < tpm < 90 ns
500 Ω Load Peak Current Ipr 0.85 ~ 1.2 A @ 400 V condition per standard
500 Ω Load I100 0.23 ~ 0.4 A @ 400 V condition per standard
500 Ω Load I200 30 – 50% of measured I100 A  

5.    Ordering Information

Line Part # or Option # Description
TLP IV-Curve System Basic Configuration
1.1 ES622-20 ES622 TLP Pulsed IV-Curve System, 20 A Base Unit
1.2 ES622-25 ES622 TLP Pulsed IV-Curve System, 25 A Base Unit
1.3 ES622-40 ES622 TLP Pulsed IV-Curve System, 40 A Base Unit
1.4 ES622-50 ES622 TLP Pulsed IV-Curve System, 50 A Base Unit
1.5 ES622-60 ES622 TLP Pulsed IV-Curve System, 50 A Base Unit
1.6 ES622-80 ES622 TLP Pulsed IV-Curve System, 80 A Base Unit
1.7 ES622-100 ES622 TLP Pulsed IV-Curve System, 100 A Base Unit
1.8 ES622-125 ES622 TLP Pulsed IV-Curve System, 125 A Base Unit
1.9 ES622-150 ES622 TLP Pulsed IV-Curve System, 150 A Base Unit
Rise-time Options (example configuration only, customizable option available)
2.1 ES62x-PRT4 Programmable pulse rise-time filter X4 module
(Default:   Intrinsic, 1 ns, 5 ns, 10 ns, customization available)
2.2 ES62x-PRT7 Programmable pulse rise-time filter X7 module
(Default:   Intrinsic, 0.5ns, 1 ns, 2ns, 5 ns, 10 ns, 20ns, customization available)
2.3 ES62x-ERTF External Manual Rise-time Filter
Pulse-width Options (example configuration only, customizable option available)
3.1 ES620-PPL4 ProgrammableInternal pulse length X4 module
(Default:   5ns, 10 ns, 100 ns, 200 ns, customization available)
  ES620-PPL7 ProgrammableInternal pulse length X7 module
(Default:   5ns, 10 ns, 50ns, 100 ns, 200 ns, 500ns, 1000ns, customization available)
3.2 ES620-PPL10 ProgrammableInternal pulse length X10 module
(Default:   2ns, 5ns, 10 ns, 20ns, 50ns, 100 ns, 200 ns, 500ns, 1000ns, 1500ns, customization available)
3.3 ES620-MPLEx Manual Pulse Width Extremal Change Option
ESD Injection and IV-Curve Measurement Options
4.1 ES62X-DBLM TLP Automatic Test Software with PC
4.2 ES62X-A1 TLP IV-Curve Test Essential Accessories
4.3 ES62X-BSA Board Level Standard TLP Test Accessories
4.4 ES62X-BVA Board Level VF-TLP Test Accessories
4.5 ES62X-BBA Board Level SOA Test Additional Accessories for one channel bias
4.6 ES62X-A2 Wafer Level TLP Setup Essential Test Accessories
4.7 ES62X-WSA Wafer Level Standard TLP Test Accessories
4.8 ES62X-WVA Wafer Level VF-TLP Test Accessories
4.9 ES62X-WBA Wafer Level SOA Test Additional Accessories for one channel bias
4.10 CMPS-200A Compact Manual Probe Station with Trinocular Stereo Microscope

 

(Othe probe stations are available upon request)
External Pulse Module and measurement Options 
 

 

5.1

  

 

ES62X-HBM2

 Human Body Model (HBM) 2-pin Pulse Module:
HBM-2: 2kV HBM module, Pairing ES622-20 & ES622-25
HBM-4: 4kV HBM module, Pairing ES622-40 & ES622-50
HBM-8: 8kV HBM module, Pairing ES622-80 & ES622-100
 

 

5.2

  

 

ES62X-HMM2

 Human Metal Model (HMM) 2-pin Pulse Module:
HMM-6: 6kV HMM module, Pairing ES622-20 & ES622-25
HMM-12: 12kV HMM module, Pairing ES622-40 & ES622-50
HMM-24: 24kV HMM module, Pairing ES622-80 & ES622-100
5.3 ES62X-MM2 Metal Model (MM) 2-pin Pulse Module:
MM-2: 2kV MM module
5.4 HBM-BA1 HBM Board Level Test Accessories
5.5 MM-BA1 MM Board Level Test Accessories
5.6 TLP based-HMM-BA1 TLP based HMM Board Level Test Accessories
5.7 TLP based-HMM-WA1 TLP based HMM Wafer Level Test Accessories
Leakage or DC IV Measurement Options
6.1 ES62X-SSM System Switch Module (switching between Pulse and DC test)
6.2 ES62X-STP1 SMU Transient Protector
Third Party Equipment Paired with TLP System
7.1 MISC-OSC1 Digital Oscilloscope (1 GHz, 5 Gs, 4 Ch) (Recommended for standard TLP test)
7.2 MISC-OSC6 Digital Oscilloscope (6 GHz, 20 Gs, 4 Ch) (Recommended for VF-TLP test)
7.3 KSMU2401 Keithley 2401, 20V, 1A, 1pA/100nV, 20W, 1 Channel
7.4 KSMU2450 Keithley 2450, 200V, 1A, 10fA/10nV, 20W, 1 Channel
7.5 KSMU2400 Keithley 2400, 20V, 1A, 1pA/100nV, 20W, 1 Channel
7.6 KSMU2410 Keithley 2410, 1100V, 1A, 1pA/100nV, 20W, 1 Channel
7.7 KSMU2602B Keithley 2602B, 40V, 3A, 100fA/100nV, 40W, 2 Channel
7.8 KSMU2635B Keithley 2635B, 200V, 10A, 0.1fA/100nV, 200W, 2 Channel
7.9 KSMUB2902A Keithley B2902A, 210V, 10.5A, 10fA/100nV, 31.8W, 2 Channel
7.10 KPI2230-30-1 Keithley 2230-30-1 3-Channel Programmable DC Power Supply

ES622 Series TLP Pulsed IV-Curve System, Many customized specifications are available upon request.

 



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