設(shè)備規(guī)格:
1.手動操作模式;
2. 適應(yīng)于 2英寸-4英寸 晶圓或者支持 (100mmx100mm)樣品;
3.退火溫度范圍 300℃-1000℃;
4.升溫速率 ≦100℃/sec(裸片);
5.溫度均勻性 ≦±1%(>500 ℃);
6.常壓腔體(可選配真空腔體);
7.冷卻方式包括水冷和氮?dú)獯祾撸?/span>
8.MFC控制,1-4路制程氣體。
設(shè)備規(guī)格:
1.手動操作模式;
2. 適應(yīng)于 2英寸-4英寸 晶圓或者支持 (100mmx100mm)樣品;
3.退火溫度范圍 300℃-1000℃;
4.升溫速率 ≦100℃/sec(裸片);
5.溫度均勻性 ≦±1%(>500 ℃);
6.常壓腔體(可選配真空腔體);
7.冷卻方式包括水冷和氮?dú)獯祾撸?/span>
8.MFC控制,1-4路制程氣體。
Larcomse Equipment (Shanghai) Co., Ltd. was established in 2018 and is located in Pudong New Area, Shanghai. The company focuses on the R & D, production and sales of semiconductor chip equipment, providing high-end equipment and high-quality services for the semiconductor chip manufacturing industry